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Fundamental Principles of Optical Lithography: The Science of Microfabrication (Repost)

Posted By: zolao
Fundamental Principles of Optical Lithography: The Science of Microfabrication (Repost)

Fundamental Principles of Optical Lithography: The Science of Microfabrication By Chris Mack
2007 | 532 Pages | ISBN: 0470018933 | PDF | 7 MB

Microlithography is the main technical driving force behind one of the most important phenomenon in the history of technology - microelectronics and the incredible shrinking transistor. These dramatic increases in electronic functionality per unit cost each year for early five decades, have transformed society.

Fundamental Principles of Optical Lithography: The Science of Microfabrication (Repost)