Scanning Probe Lithography: Fundamentals, Materials, and Applications
Scanning Probe Lithography: Fundamentals, Materials, and Applications
English | 2023 | ISBN: 1032122145 | 145 Pages | PDF (True) | 5.22 MB
English | 2023 | ISBN: 1032122145 | 145 Pages | PDF (True) | 5.22 MB
The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials.