MEMS Resonator Filters
MEMS Resonator Filters (Materials, Circuits and Devices)
by Rajendra M. Patrikar
English | 2021 | ISBN: 1785618962 | 440 Pages | PDF True | 48 MB
by Rajendra M. Patrikar
English | 2021 | ISBN: 1785618962 | 440 Pages | PDF True | 48 MB
This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed. Materials and their selection, CAD tools for system design and the integration of MEMS with CMOS circuitry, and the design, fabrication, testing and packaging of MEMS filters themselves are addressed in detail.