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Silicon Technologies: Ion Implantation and Thermal Treatment

Posted By: ksveta6
Date: 9 Nov 2013 14:11:39
Silicon Technologies: Ion Implantation and Thermal Treatment

Silicon Technologies: Ion Implantation and Thermal Treatment (ISTE) by Annie Baudrant
2011 | ISBN: 1848212313 | English | 368 pages | PDF | 17.65 MB

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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