Handbook of Photomask Manufacturing Technology by Syed Rizvi
Handbook of Photomask Manufacturing Technology by Syed Rizvi
CRC Press; 1 edition | April 7, 2005 | English | ISBN: 0824747690 | 878 pages | PDF | 32 MB
CRC Press; 1 edition | April 7, 2005 | English | ISBN: 0824747690 | 878 pages | PDF | 32 MB
As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it becomes increasingly important for new technologies to keep apace with these demands. Photomask technology is one of the key areas to achieving this goal. Although brief overviews of photomask technology exist in the literature, the Handbook of Photomask Manufacturing Technology is the first in-depth, comprehensive treatment of existing and emerging photomask technologies available.