CMOS Hotplate Chemical Microsensors (Repost)
Markus Graf, Diego Barrettino, Henry P. Baltes, "CMOS Hotplate Chemical Microsensors"
English | 2007 | ISBN: 3540695613 | PDF | pages: 131 | 3.1 mb
English | 2007 | ISBN: 3540695613 | PDF | pages: 131 | 3.1 mb
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.