"Micromachining" ed. by Zdravko Stanimirović, Ivanka Stanimirović

This buuk will give you the opportunity to understand the concepts of micromachining of advanced materials. The book will allow both professionals and readers not involved in the immediate field to understand and enjoy the topic.

To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and the simulation of micromachining processes.

Contents
1.Micromachining of Advanced Materials
2.Pico- and Femtosecond Laser Micromachining for Surface Texturing
3.Silicon-Based Micromachining Process for Flexible Electronics
4.CMOS Compatible Wet Bulk Micromachining for MEMS Applications
5.Physical Processes and Plasma Parameters in a Radio-Frequency Hybrid Plasma System for Thin-Film Production with Ion Assistance
6.Study on Specific Coefficient in Micromachining Process
7.Multiscale Simulation of Surface Defect Influence in Nanoindentation by a Quasi-Continuum Method