"Recent Advances in Nanofabrication Techniques and Applications" ed. by Bo Cui (Repost)

This book aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. The book focuses on in-depth studies of a particular research field, and are targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students.

Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.

Contents
Preface
Part 1 Electron and Ion Beam Lithography
1 Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch
2 Focused Ion Beam Lithography
3 Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam
4 Character Projection Lithography for Application-Specific Integrated Circuits
5 Transform-Based Lossless Image Compression Algorithm for Electron Beam Direct Write Lithography Systems
Part 2 Nanoimprint and Soft Lithography
6 Ultrafast Fabrication of Metal Nanostructures Using Pulsed Laser Melting
7 Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale
8 Repairing Nanoimprint Mold Defects by Focused-lon-Beam Etching and Deposition
9 Improving the Light-Emitting Efficiency of GaN LEDs Using Nanoimprint Lithography
10 Fabrication of Circular Grating Distributed Feedback Dye Laser by Nanoimprint Lithography
11 Application of Nanoimprint Lithography to Distributed Feedback Laser Diodes
12 Guided-Mode Resonance Filters Fabricated with Soft Lithography
Part 3lnterference. Two-Photon, UV and X-Ray Lithography
13 DUV Interferometry for Micro and Nanopatterned Surfaces
14 Ultrashort Pulsed Lasers - Efficient Tools for Materials Micro-Processing
15 Laser-Based Lithography for Polymeric Nanocomposite Structures
16 Fabrication of 3-D Structures Utilizing Synchrotron Radiation Lithography
17 Emerging Maskless Nanolithography Based on Novel Diffraction Gratings
Part 4 EUV Lithography and Resolution Enhancement Techniques
18 Laser-Plasma Extreme Ultraviolet Source Incorporating a Cryogenic Xe Target
19 Irradiation Effects on EUV Nanolithography Collector Mirrors
20 High-lndex Immersion Lithography
21 Double Patterning for Memory ICs
22 Diffraction Based Overlay Metrology for Double Patterning Technologies
Part 5 Other Lithographic Technologies: Scanning Probe, Nanosphere, Inkjet Printing, etc.
23 Nanolithography Study Using Scanning Probe Microscope
24 Scanning Probe Lithography on Organic Monolayers
25 Controlled Fabrication of Noble Metal Nanomaterials via Nanosphere Lithography and Their Optical Properties
26 A Feasible Routine for Large-Scale Nanopatterning via Nanosphere Lithography
27 Electrohydrodynamic Inkjet - Micro Pattern Fabrication for Printed Electronics Applications
28 Lithography-Free Nanostructure Fabrication Techniques Utilizing Thin-Film Edges
29 Extremely Wetting Pattern by Photocatalytic Lithography and Its Application