Mark J. Jackson, «Micro and Nanomanufacturing»
Springer | ISBN: 0387258744 | 1 edition (November 27, 2006) | 702 pages | PDF | 43.2 Mb
Springer | ISBN: 0387258744 | 1 edition (November 27, 2006) | 702 pages | PDF | 43.2 Mb
Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems.
Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.
Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about:
- Manufacturing and fabrication techniques at the micro and nanoscales
- Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors
- Producing master molds with micromachining
- The deposition of thin films, pulsed water drop machining, and nanomachining
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