Field Guide to Optical Lithography
Field Guide to Optical Lithography By Chris A. Mack
2006 | 136 Pages | ISBN: 0819462071 | PDF | 4 MB
2006 | 136 Pages | ISBN: 0819462071 | PDF | 4 MB
The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry. Contents - Symbol Glossary - The Lithgraphy Process - Image Formation - Imaging into a Photoresist - Photoresist Chemistry - Lithography Control and Optimization - Equation Summary - Glossary - Index