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ULSI Front-end Technology: Covering From The First Semiconductor Paper To CMOS FINFET Technology

Posted By: Underaglassmoon
Date: 31 Oct 2017 15:29:08
ULSI Front-end Technology: Covering From The First Semiconductor Paper To CMOS FINFET Technology

ULSI Front-end Technology: Covering From The First Semiconductor Paper To CMOS FINFET Technology
World Scientific | English | Oct 2017 | ISBN-10: 9813222158 | 248 pages | PDF | 5.78 mb

by Wai Shing Lau (Author)

The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.
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