ULSI Front-end Technology: Covering From The First Semiconductor Paper To CMOS FINFET Technology
ULSI Front-end Technology: Covering From The First Semiconductor Paper To CMOS FINFET Technology
World Scientific | English | Oct 2017 | ISBN-10: 9813222158 | 248 pages | PDF | 5.78 mb
World Scientific | English | Oct 2017 | ISBN-10: 9813222158 | 248 pages | PDF | 5.78 mb
by Wai Shing Lau (Author)
The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.