Lithography
Lithography by Stefan Landis
English | December 20, 2010 | ISBN: 184821202X | 320 pages | AZW3 | 5.05 MB
English | December 20, 2010 | ISBN: 184821202X | 320 pages | AZW3 | 5.05 MB
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.